Axcelis Technologies (United States)

Axcelis Technologies (United States)

Axcelis Technologies, Inc. is an American company engaging in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. Derived from Wikipedia licensed CC-BY-SA.

Open Access statistics for Axcelis Technologies (United States), United States, covering academic research published from 2001 to 2024. Read More.


Open Access Percentage

7%


Total
Publications

265


Total Open
Publications

19


Total
Citations

1.5K


Open Access
Percentage

7%


Total
Publications

265


Total Open
Publications

19


Total
Citations

1.5K

Wikipedia

Website

download

Breakdown

4% 2% 1% 93%

Publisher Open

4%

Both

2%

Other Platform Open

1%

Closed

93%

Percentage of Open Access over time

0%10%20%30%40%50%60%70%80%90%100%
200120022003200420052006200720082009201020112012201320142015201620172018201920202021202220232024

Publisher Open

Both

Other Platform Open

Closed

Volume of Open Access over time

051015202530Total Publications
200120022003200420052006200720082009201020112012201320142015201620172018201920202021202220232024

Open

Closed

Publisher Open

18%OA Journal

OA Journal 18%

3

Hybrid 35%

6

No Guarantees 47%

8

Other Platform Open

Institution 50%

4

Other Internet 38%

3

Preprint 25%

2

Domain 0%

0

Public 0%

0

Other Platform Locations

Name

Platform Type

Publications

Le Centre pour la Communication Scientifique Directe - HAL - TYPE ART
Other Internet
2
Le Centre pour la Communication Scientifique Directe - HAL - Diderot
Institution
2
arXiv
Preprint
2
U.S. Department of Energy Office of Scientific and Technical Information - OSTI OAI
Institution
1
Le Centre pour la Communication Scientifique Directe - HAL - Université Paris Descartes
Institution
1
Le Centre pour la Communication Scientifique Directe - HAL - Université de Nantes
Institution
1
ETH Zurich - Repository for Publications and Research Data
Institution
1
California Digital Library - eScholarship
Other Internet
1
Aalto University - Aaltodoc
Institution
1
1 / 1

Data updated 7 April 2025

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