Axcelis Technologies (United States)

Axcelis Technologies (United States)

Axcelis Technologies, Inc. is an American company engaging in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. Derived from Wikipedia licensed CC-BY-SA.

Open Access statistics for Axcelis Technologies (United States), United States, covering academic research published from 2001 to 2024. Read More.


Open Access Percentage

7%


Total
Publications

265


Total Open
Publications

18


Total
Citations

1.5K


Open Access
Percentage

7%


Total
Publications

265


Total Open
Publications

18


Total
Citations

1.5K

Wikipedia

Website

download

Breakdown

4% 2% 1% 93%

Publisher Open

4%

Both

2%

Other Platform Open

1%

Closed

93%

Percentage of Open Access over time

0%10%20%30%40%50%60%70%80%90%100%
200120022003200420052006200720082009201020112012201320142015201620172018201920202021202220232024

Publisher Open

Both

Other Platform Open

Closed

Volume of Open Access over time

051015202530Total Publications
200120022003200420052006200720082009201020112012201320142015201620172018201920202021202220232024

Open

Closed

Publisher Open

30%OA Journal

OA Journal 30%

5

Hybrid 29%

5

No Guarantees 41%

7

Other Platform Open

Institution 67%

6

Other Internet 22%

2

Preprint 11%

1

Domain 0%

0

Public 0%

0

Other Platform Locations

Name

Platform Type

Publications

Le Centre pour la Communication Scientifique Directe - HAL - Diderot
Institution
3
DOI
Other Internet
2
U.S. Department of Energy Office of Scientific and Technical Information - OSTI OAI
Institution
1
ETH Zurich - Repository for Publications and Research Data
Institution
1
arXiv
Preprint
1
Aalto University - Aaltodoc
Institution
1
1 / 1

Data updated 18 August 2025

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